Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470872 | Reflective optical element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schneider, Hendrik Wagner +1 more | 2016-10-18 |
| 9348234 | Microlithographic apparatus | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Martin von Hodenberg +1 more | 2016-05-24 |