Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494868 | Lithographic projection objective | Olaf Rogalsky, Thomas Petasch, Jochen Haeussler | 2016-11-15 |
| 9470872 | Reflective optical element | Norbert Wabra, Sonja Schneider, Ricarda Schneider, Hendrik Wagner, Rumen Iliew +1 more | 2016-10-18 |
| 9423696 | Projection exposure apparatus with optimized adjustment possibility | — | 2016-08-23 |
| 9377694 | Projection arrangement | Rolf Freimann | 2016-06-28 |
| 9372411 | Projection objective of a microlithographic projection exposure apparatus | Johannes Zellner, Norbert Wabra, Martin von Hodenberg, Sonja Schneider, Ricarda Schoemer +4 more | 2016-06-21 |
| 9354524 | Projection exposure apparatus with optimized adjustment possibility | Holger Walter, Matthias Roesch | 2016-05-31 |
| 9348234 | Microlithographic apparatus | Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Martin von Hodenberg, Hendrik Wagner +1 more | 2016-05-24 |
| 9235143 | Microlithographic projection exposure apparatus | Norbert Wabra | 2016-01-12 |