Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9372411 | Projection objective of a microlithographic projection exposure apparatus | Boris Bittner, Norbert Wabra, Martin von Hodenberg, Sonja Schneider, Ricarda Schoemer +4 more | 2016-06-21 |
| 9304408 | Projection objective for microlithography | Hans-Juergen Mann, Martin Endres | 2016-04-05 |