Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470872 | Reflective optical element | Boris Bittner, Norbert Wabra, Ricarda Schneider, Hendrik Wagner, Rumen Iliew +1 more | 2016-10-18 |
| 9372411 | Projection objective of a microlithographic projection exposure apparatus | Johannes Zellner, Boris Bittner, Norbert Wabra, Martin von Hodenberg, Ricarda Schoemer +4 more | 2016-06-21 |
| 9348234 | Microlithographic apparatus | Boris Bittner, Norbert Wabra, Ricarda Schoemer, Martin von Hodenberg, Hendrik Wagner +1 more | 2016-05-24 |