Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494483 | Measuring system for measuring an imaging quality of an EUV lens | Ralf Frese, Michael Samaniego, Markus Deguenther, Helmut Haidner, Martin Schriever | 2016-11-15 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2016-09-06 |