Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494483 | Measuring system for measuring an imaging quality of an EUV lens | Ralf Frese, Michael Samaniego, Markus Deguenther, Rainer Hoch, Martin Schriever | 2016-11-15 |
| 9482968 | Measuring system | Markus Goeppert, Rolf Freimann, Christoph Striebel | 2016-11-01 |