Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436101 | Optical arrangement and microlithographic projection exposure apparatus including same | Armin Schoeppach, Hans-Juergen Mann, Yim-Bun Patrick Kwan | 2016-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436101 | Optical arrangement and microlithographic projection exposure apparatus including same | Armin Schoeppach, Hans-Juergen Mann, Yim-Bun Patrick Kwan | 2016-09-06 |