Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Matthias Orth, Norbert Muehlberger, Thorsten Rassel, Armin Werber +1 more | 2016-12-06 |
| 9436101 | Optical arrangement and microlithographic projection exposure apparatus including same | Hans-Juergen Mann, Frank Eisert, Yim-Bun Patrick Kwan | 2016-09-06 |
| 9341807 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Thorsten Rassel, Juergen Fischer, Matthias Orth | 2016-05-17 |