Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523922 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Daniel Benz, Severin Waldis, Berndt Warm | 2016-12-20 |
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Norbert Muehlberger, Thorsten Rassel +1 more | 2016-12-06 |
| 9411241 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Norbert Muehlberger, Florian Bach | 2016-08-09 |
| 9274434 | Light modulator and illumination system of a microlithographic projection exposure apparatus | Severin Waldis, Florian Bach | 2016-03-01 |