Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523922 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Daniel Benz, Severin Waldis, Armin Werber, Berndt Warm | 2016-12-20 |
| 9448384 | Arrangement for mounting an optical element | Michael Erath, Ulrich Schoenhoff, Rodolfo Rabe, Norbert Muehlberger, Dirk Eicher +1 more | 2016-09-20 |
| 9411241 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Armin Werber, Norbert Muehlberger | 2016-08-09 |
| 9274434 | Light modulator and illumination system of a microlithographic projection exposure apparatus | Armin Werber, Severin Waldis | 2016-03-01 |
| 9239229 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2016-01-19 |