Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523922 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Daniel Benz, Armin Werber, Berndt Warm | 2016-12-20 |
| 9274434 | Light modulator and illumination system of a microlithographic projection exposure apparatus | Armin Werber, Florian Bach | 2016-03-01 |