Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523922 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Daniel Benz, Severin Waldis, Armin Werber | 2016-12-20 |
| 9393157 | Image processing method for determining focus depth of a refractive laser | — | 2016-07-19 |