Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448384 | Arrangement for mounting an optical element | Michael Erath, Florian Bach, Rodolfo Rabe, Norbert Muehlberger, Dirk Eicher +1 more | 2016-09-20 |
| 9410662 | Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus | Bernhard Geuppert, Rodolfo Rabe | 2016-08-09 |
| 9304404 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Juergen Fischer, Bernhard Geuppert, Hans Butler, Robertus Johannes Marinus De Jongh | 2016-04-05 |