Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2016-09-06 |
| 9410662 | Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus | Rodolfo Rabe, Ulrich Schoenhoff | 2016-08-09 |
| 9304404 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Juergen Fischer, Ulrich Schoenhoff, Hans Butler, Robertus Johannes Marinus De Jongh | 2016-04-05 |