Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Thorsten Rassel, Armin Werber +1 more | 2016-12-06 |
| 9448384 | Arrangement for mounting an optical element | Michael Erath, Florian Bach, Ulrich Schoenhoff, Rodolfo Rabe, Dirk Eicher +1 more | 2016-09-20 |
| 9411241 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Armin Werber, Florian Bach | 2016-08-09 |
| 9341807 | Gravitation compensation for optical elements in projection exposure apparatuses | Thorsten Rassel, Armin Schoeppach, Juergen Fischer, Matthias Orth | 2016-05-17 |