Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341953 | Microlithographic illumination system | Markus Deguenther, Michael Layh, Michael Gerhard, Bruno Thome | 2016-05-17 |
| 9316918 | EUV collector | Hans-Juergen Mann | 2016-04-19 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341953 | Microlithographic illumination system | Markus Deguenther, Michael Layh, Michael Gerhard, Bruno Thome | 2016-05-17 |
| 9316918 | EUV collector | Hans-Juergen Mann | 2016-04-19 |