Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341953 | Microlithographic illumination system | Markus Deguenther, Michael Gerhard, Bruno Thome, Wolfgang Singer | 2016-05-17 |
| 9310692 | Component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus | Ralf Stuetzle, Martin Endres, Jens Ossmann | 2016-04-12 |
| 9310694 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther | 2016-04-12 |
| 9304400 | Illumination system for EUV microlithography | Ralf Stuetzle, Damian Fiolka, Martin Endres, Holger Weigand | 2016-04-05 |
| 9239229 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2016-01-19 |