Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477157 | Illumination system of a microlithographic projection exposure apparatus | Stig Bieling, Markus Deguenther, Frank Schlesener, Markus Schwab | 2016-10-25 |
| 9423686 | Mask for microlithography and scanning projection exposure method utilizing the mask | Markus Deguenther | 2016-08-23 |
| 9310694 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Markus Deguenther, Michael Layh | 2016-04-12 |
| 9280061 | Illumination optical unit for EUV projection lithography | — | 2016-03-08 |
| 9280055 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther | 2016-03-08 |
| 9261695 | Illumination system of a microlithographic projection exposure apparatus | — | 2016-02-16 |
| 9239229 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2016-01-19 |