Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477157 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Frank Schlesener | 2016-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477157 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Frank Schlesener | 2016-10-25 |