Issued Patents 2016
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507269 | Illumination optical unit for projection lithography | Christoph Hennerkes, Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier | 2016-11-29 |
| 9500956 | Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure | Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Christoph Hennerkes | 2016-11-22 |
| 9500954 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Thomas Korb, Stefanie Hilt, Wolfgang Hoegele | 2016-11-22 |
| 9488918 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger | 2016-11-08 |
| 9477157 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Markus Schwab | 2016-10-25 |
| 9442385 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger | 2016-09-13 |
| 9411245 | Polarization-influencing optical arrangement, in particular in a microlithographic projection exposure apparatus | Ingo Saenger | 2016-08-09 |
| 9341957 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Oliver Natt | 2016-05-17 |
| 9310690 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Thomas Korb, Stefanie Hilt, Wolfgang Hoegele | 2016-04-12 |
| 9280060 | Illumination system for microlithography | Axel Scholz, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2016-03-08 |