Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341957 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Frank Schlesener | 2016-05-17 |
| 9316929 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2016-04-19 |
| 9298097 | Projection exposure apparatus for EUV microlithography and method for microlithographic exposure | Marc Bienert, Heiko Feldmann, Aksel Goehnermeier, Johannes Ruoff | 2016-03-29 |