Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507269 | Illumination optical unit for projection lithography | Christoph Hennerkes, Ingo Saenger, Joerg Zimmermann, Martin Meier, Frank Schlesener | 2016-11-29 |
| 9500956 | Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure | Ingo Saenger, Joerg Zimmermann, Martin Meier, Frank Schlesener, Christoph Hennerkes | 2016-11-22 |
| 9298097 | Projection exposure apparatus for EUV microlithography and method for microlithographic exposure | Marc Bienert, Heiko Feldmann, Aksel Goehnermeier, Oliver Natt | 2016-03-29 |