Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507269 | Illumination optical unit for projection lithography | Christoph Hennerkes, Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Frank Schlesener | 2016-11-29 |
| 9500956 | Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure | Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Frank Schlesener, Christoph Hennerkes | 2016-11-22 |
| 9487341 | Apparatus for dispensing flowable substances | Beatus Ineichen | 2016-11-08 |
| 9441758 | Valve device, valve assembly and method for calibrating a valve assembly | Martin Maichl, Andreas Dickhoff | 2016-09-13 |
| 9394097 | Apparatus for dispensing flowable substances | Beatus Ineichen | 2016-07-19 |