Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507269 | Illumination optical unit for projection lithography | Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener | 2016-11-29 |
| 9500956 | Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure | Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener | 2016-11-22 |
| 9405202 | Optical system of a microlithographic projection exposure apparatus | Ingo Saenger | 2016-08-02 |