Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507269 | Illumination optical unit for projection lithography | Christoph Hennerkes, Ingo Saenger, Johannes Ruoff, Martin Meier, Frank Schlesener | 2016-11-29 |
| 9500956 | Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure | Ingo Saenger, Johannes Ruoff, Martin Meier, Frank Schlesener, Christoph Hennerkes | 2016-11-22 |
| 9323156 | Optical system of a microlithographic projection exposure apparatus | Ingo Saenger, Olaf Dittmann | 2016-04-26 |
| 9263752 | Magnetic fluid coupling assemblies and methods | Jeremy Schrooten | 2016-02-16 |