Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507269 | Illumination optical unit for projection lithography | Christoph Hennerkes, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener | 2016-11-29 |
| 9500956 | Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure | Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener, Christoph Hennerkes | 2016-11-22 |
| 9488918 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Frank Schlesener | 2016-11-08 |
| 9477025 | EUV light source for generating a used output beam for a projection exposure apparatus | — | 2016-10-25 |
| 9442385 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Frank Schlesener | 2016-09-13 |
| 9411245 | Polarization-influencing optical arrangement, in particular in a microlithographic projection exposure apparatus | Frank Schlesener | 2016-08-09 |
| 9405202 | Optical system of a microlithographic projection exposure apparatus | Christoph Hennerkes | 2016-08-02 |
| 9323156 | Optical system of a microlithographic projection exposure apparatus | Olaf Dittmann, Joerg Zimmermann | 2016-04-26 |
| 9316920 | Illumination system of a microlithographic projection exposure apparatus with a birefringent element | Damian Fiolka, Daniel Walldorf | 2016-04-19 |