Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298097 | Projection exposure apparatus for EUV microlithography and method for microlithographic exposure | Heiko Feldmann, Aksel Goehnermeier, Oliver Natt, Johannes Ruoff | 2016-03-29 |