Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442393 | Projection exposure tool for microlithography and method for microlithographic imaging | Jochen Hetzler | 2016-09-13 |
| 9383190 | Measuring apparatus and method for determining dimensional characteristics of a measurement object | David Shafer, Markus Seesselberg, Norbert Kerwien, Thomas Engel | 2016-07-05 |
| 9298097 | Projection exposure apparatus for EUV microlithography and method for microlithographic exposure | Marc Bienert, Heiko Feldmann, Oliver Natt, Johannes Ruoff | 2016-03-29 |