Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500954 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Thomas Korb, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2016-11-22 |
| 9310690 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Thomas Korb, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2016-04-12 |
| 9280060 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2016-03-08 |