Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341953 | Microlithographic illumination system | Markus Deguenther, Michael Layh, Bruno Thome, Wolfgang Singer | 2016-05-17 |
| 9310693 | Method for operating a projection exposure tool and control apparatus | Bernd Doerband, Toralf Gruner | 2016-04-12 |
| 9280060 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Gerhard-Wilhelm Ziegler +8 more | 2016-03-08 |