Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459435 | Catadioptric projection objective comprising deflection mirrors and projection exposure method | Thomas Schicketanz | 2016-10-04 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2016-09-06 |
| 9360775 | Method of manufacturing a projection objective and projection objective | Heiko Feldmann, Alexander Epple | 2016-06-07 |
| 9310693 | Method for operating a projection exposure tool and control apparatus | Michael Gerhard, Bernd Doerband | 2016-04-12 |
| 9279969 | Catadioptric projection objective | Alexander Epple, Vladimir Kamenov, Thomas Schicketanz | 2016-03-08 |
| 9274327 | Catadioptric projection objective comprising deflection mirrors and projection exposure method | Thomas Schicketanz | 2016-03-01 |