Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9310693 | Method for operating a projection exposure tool and control apparatus | Michael Gerhard, Toralf Gruner | 2016-04-12 |
| 9250062 | Devices for determining layer thickness and/or contamination level of a belt | Ralf Lindner | 2016-02-02 |