Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341953 | Microlithographic illumination system | Markus Deguenther, Michael Layh, Michael Gerhard, Wolfgang Singer | 2016-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341953 | Microlithographic illumination system | Markus Deguenther, Michael Layh, Michael Gerhard, Wolfgang Singer | 2016-05-17 |