Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9310694 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2016-04-12 |