Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470981 | Microlithographic projection exposure apparatus illumination optics | — | 2016-10-18 |
| 9310694 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2016-04-12 |