Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442381 | Method of operating a projection exposure tool for microlithography | Michael Totzeck, Ulrich Loering, Dirk Juergens, Ralf Mueller, Christian Wald | 2016-09-13 |
| 9366977 | Semiconductor microlithography projection exposure apparatus | Sascha Bleidistel, Arif Kazi | 2016-06-14 |