Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9366857 | Correction of optical elements by correction light irradiated in a flat manner | Manfred Maul | 2016-06-14 |
| 9366977 | Semiconductor microlithography projection exposure apparatus | Olaf Conradi, Arif Kazi | 2016-06-14 |