Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411250 | Radiation system and lithographic apparatus | Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Vladimir Mihailovitch Krivtsun | 2016-08-09 |
| 9366967 | Radiation source | Andrei Mikhailovich Yakunin, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Gerardus Hubertus Petrus Maria Swinkels, Jan Bernard Plechelmus Van Schoot | 2016-06-14 |
| 9363879 | Module and method for producing extreme ultraviolet radiation | Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more | 2016-06-07 |
| 9307624 | Lithographic apparatus | Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Konstantin Nikolaevich Koshelev, Givi Georgievich Zukakishvili, Vladimir Mihailovitch Krivtsun +3 more | 2016-04-05 |