Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529283 | Radiation source, lithographic apparatus, and device manufacturing method | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Leonid Aizikovitch Sjmaenok | 2016-12-27 |
| 9411238 | Source-collector device, lithographic apparatus, and device manufacturing method | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen, Olav Waldemar Vladimir Frijns +5 more | 2016-08-09 |
| 9363879 | Module and method for producing extreme ultraviolet radiation | Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot +4 more | 2016-06-07 |