Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411238 | Source-collector device, lithographic apparatus, and device manufacturing method | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen +5 more | 2016-08-09 |
| 9377695 | Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine | 2016-06-28 |