Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529283 | Radiation source, lithographic apparatus, and device manufacturing method | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors | 2016-12-27 |
| 9448492 | Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus | Andrei Mikhailovich Yakunin, Denis Alexandrovich Glushkov, Vladimir Nikolaevich Polkovnikov, Nikolay Nikolaevitch Salashchenko | 2016-09-20 |
| 9285690 | Mirror, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Andrei Mikhailovich Yakunin | 2016-03-15 |