Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476841 | High-brightness LPP EUV light source | Pavel Stanislavovich Antsiferov, Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich KRYVOKORYTOV +7 more | 2016-10-25 |
| 9448492 | Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus | Andrei Mikhailovich Yakunin, Vladimir Nikolaevich Polkovnikov, Nikolay Nikolaevitch Salashchenko, Leonid Aizikovitch Sjmaenok | 2016-09-20 |
| 9307624 | Lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Givi Georgievich Zukakishvili, Vladimir Mihailovitch Krivtsun +3 more | 2016-04-05 |