Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513109 | Lithographic mask, lithographic apparatus and method | — | 2016-12-06 |
| 9513553 | Methods of providing patterned epitaxy templates for self-assemblable block copolymers for use in device lithography | Sander Frederik Wuister, Vadim Yevgenyevich Banine, Roelof Koole, Emiel Peeters, Harmeet Singh | 2016-12-06 |
| 9285685 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Paul Graupner, Johannes Catharinus Hubertus Mulkens +1 more | 2016-03-15 |
| 9229324 | Methods of providing patterned templates for self-assemblable block copolymers for use in device lithography | Harmeet Singh, Vadim Yevgenyevich Banine, Sander Frederik Wuister, Roelof Koole, Emiel Peeters | 2016-01-05 |
| 9229336 | Lithographic apparatus and methods for determining an improved configuration of a lithographic apparatus | Bernardo Kastrup, Sander De Putter | 2016-01-05 |