Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494878 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Edwin Johan Buis, Sven Antoin Johan Hol, Erik Maria Rekkers | 2016-11-15 |
| 9372413 | Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Franciscus Johannes Joseph Janssen, Nicolaas Aldegonda Jan Maria Van Aerle | 2016-06-21 |