Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494878 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Edwin Johan Buis, Gosse Charles De Vries, Sven Antoin Johan Hol | 2016-11-15 |