Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9316924 | Lithographic apparatus, excimer laser and device manufacturing method | Robertus Cornelis Martinus De Kruif, Johannes Wilhelmus Maria Cornelis Teeuwsen, Erik Petrus Buurman | 2016-04-19 |
| 9298110 | Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device | Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof, Adrianus Johannes Maria Van Dijk +2 more | 2016-03-29 |