Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298110 | Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device | Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof +2 more | 2016-03-29 |