Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465306 | Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device | Maarten Marinus Johannes Wilhelmus Van Herpen, Andrei Mikhailovich Yakunin | 2016-10-11 |