Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378722 | Lithographic apparatus with actuator to compensate acoustic vibration | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Peter Paul HEMPENIUS, Joost De Pee +5 more | 2016-06-28 |