Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482967 | Lithographic apparatus, control system and device manufacturing method | Marcus Adrianus Van De Kerkhof, Johannes Henricus Wilhelmus Jacobs, Nicolas Lallemant | 2016-11-01 |
| 9442388 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more | 2016-09-13 |